JPH0322547B2 - - Google Patents

Info

Publication number
JPH0322547B2
JPH0322547B2 JP10305485A JP10305485A JPH0322547B2 JP H0322547 B2 JPH0322547 B2 JP H0322547B2 JP 10305485 A JP10305485 A JP 10305485A JP 10305485 A JP10305485 A JP 10305485A JP H0322547 B2 JPH0322547 B2 JP H0322547B2
Authority
JP
Japan
Prior art keywords
clean
primary
space
clean space
hepa filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10305485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61262537A (ja
Inventor
Kojiro Obara
Katsuyasu Kitanaka
Kyoshi Fujioka
Mitsuyoshi Kishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10305485A priority Critical patent/JPS61262537A/ja
Publication of JPS61262537A publication Critical patent/JPS61262537A/ja
Publication of JPH0322547B2 publication Critical patent/JPH0322547B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP10305485A 1985-05-15 1985-05-15 空気清浄装置 Granted JPS61262537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10305485A JPS61262537A (ja) 1985-05-15 1985-05-15 空気清浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10305485A JPS61262537A (ja) 1985-05-15 1985-05-15 空気清浄装置

Publications (2)

Publication Number Publication Date
JPS61262537A JPS61262537A (ja) 1986-11-20
JPH0322547B2 true JPH0322547B2 (en]) 1991-03-27

Family

ID=14343954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10305485A Granted JPS61262537A (ja) 1985-05-15 1985-05-15 空気清浄装置

Country Status (1)

Country Link
JP (1) JPS61262537A (en])

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064125B2 (ja) * 1986-06-20 1994-01-19 日本エア−・フィルタ−株式会社 クリ−ンベンチ
JPS63247543A (ja) * 1987-04-02 1988-10-14 Nikon Corp 空調機
JPH0520409Y2 (en]) * 1987-09-14 1993-05-27
JP2585368B2 (ja) * 1988-05-13 1997-02-26 株式会社日立製作所 清浄キャビネット
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
US5582865A (en) * 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
JP2750304B2 (ja) * 1989-12-27 1998-05-13 東京エレクトロン株式会社 クリーンルーム
US5607647A (en) * 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
WO1995019828A1 (en) * 1994-01-25 1995-07-27 Extraction Systems, Inc. Air filtering
US5487768A (en) * 1994-01-31 1996-01-30 Zytka; Donald J. Minienvironment for material handling
US5833726A (en) * 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
US5997399A (en) * 1997-05-09 1999-12-07 La Calhene, Inc. Isolation chamber air curtain apparatus
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP6178973B2 (ja) * 2013-03-14 2017-08-16 パナソニックＩｐマネジメント株式会社 除塵ブース
JP6302744B2 (ja) * 2014-05-28 2018-03-28 ダイダン株式会社 コンタミネーション防止可能な安全キャビネット
JP6328826B1 (ja) * 2017-06-09 2018-05-23 株式会社日本医化器械製作所 グローブボックス付安全キャビネット、及び該安全キャビネットを備えたクリーンシステム

Also Published As

Publication number Publication date
JPS61262537A (ja) 1986-11-20

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